diff --git a/proc/proc_test.go b/proc/proc_test.go
index 5f51496d..44179e41 100644
--- a/proc/proc_test.go
+++ b/proc/proc_test.go
@@ -1556,3 +1556,23 @@ func TestIssue396(t *testing.T) {
 		assertNoError(err, t, "FindFunctionLocation()")
 	})
 }
+
+func TestIssue414(t *testing.T) {
+	// Stepping until the program exits
+	withTestProcess("math", t, func(p *Process, fixture protest.Fixture) {
+		start, _, err := p.goSymTable.LineToPC(fixture.Source, 9)
+		assertNoError(err, t, "LineToPC()")
+		_, err = p.SetBreakpoint(start)
+		assertNoError(err, t, "SetBreakpoint()")
+		assertNoError(p.Continue(), t, "Continue()")
+		for {
+			err := p.Step()
+			if err != nil {
+				if _, exited := err.(ProcessExitedError); exited {
+					break
+				}
+			}
+			assertNoError(err, t, "Step()")
+		}
+	})
+}
diff --git a/proc/threads.go b/proc/threads.go
index ff46d146..d3904b55 100644
--- a/proc/threads.go
+++ b/proc/threads.go
@@ -95,6 +95,9 @@ func (thread *Thread) StepInstruction() (err error) {
 
 	err = thread.singleStep()
 	if err != nil {
+		if _, exited := err.(ProcessExitedError); exited {
+			return err
+		}
 		return fmt.Errorf("step failed: %s", err.Error())
 	}
 	return nil
diff --git a/proc/threads_darwin.go b/proc/threads_darwin.go
index 126caa69..0c79d61e 100644
--- a/proc/threads_darwin.go
+++ b/proc/threads_darwin.go
@@ -39,8 +39,11 @@ func (t *Thread) singleStep() error {
 		return fmt.Errorf("could not single step")
 	}
 	for {
-		port := C.mach_port_wait(t.dbp.os.portSet, C.int(0))
-		if port == C.mach_port_t(t.ID) {
+		twthread, err := t.dbp.trapWait(t.dbp.Pid)
+		if err != nil {
+			return err
+		}
+		if twthread.ID == t.ID {
 			break
 		}
 	}
diff --git a/proc/threads_linux.go b/proc/threads_linux.go
index f1d649db..de29963b 100644
--- a/proc/threads_linux.go
+++ b/proc/threads_linux.go
@@ -53,6 +53,14 @@ func (t *Thread) singleStep() (err error) {
 		if err != nil {
 			return err
 		}
+		if (status == nil || status.Exited()) && wpid == t.dbp.Pid {
+			t.dbp.postExit()
+			rs := 0
+			if status != nil {
+				rs = status.ExitStatus()
+			}
+			return ProcessExitedError{Pid: t.dbp.Pid, Status: rs}
+		}
 		if wpid == t.ID && status.StopSignal() == sys.SIGTRAP {
 			return nil
 		}
diff --git a/proc/threads_windows.go b/proc/threads_windows.go
index 94ced6cd..d61a1bbf 100644
--- a/proc/threads_windows.go
+++ b/proc/threads_windows.go
@@ -1,7 +1,6 @@
 package proc
 
 import (
-	"fmt"
 	"syscall"
 
 	sys "golang.org/x/sys/windows"
@@ -48,10 +47,7 @@ func (t *Thread) singleStep() error {
 		if thread.ID == t.ID {
 			continue
 		}
-		_, err := _SuspendThread(thread.os.hThread)
-		if err != nil {
-			return fmt.Errorf("could not suspend thread: %d: %v", thread.ID, err)
-		}
+		_, _ = _SuspendThread(thread.os.hThread)
 	}
 
 	// Continue and wait for the step to complete
@@ -72,10 +68,7 @@ func (t *Thread) singleStep() error {
 		if thread.ID == t.ID {
 			continue
 		}
-		_, err := _ResumeThread(thread.os.hThread)
-		if err != nil {
-			return fmt.Errorf("could not resume thread: %d: %v", thread.ID, err)
-		}
+		_, _ = _ResumeThread(thread.os.hThread)
 	}
 
 	// Unset the processor TRAP flag